Manufacturer:KLA Corporation

Model:KLA 5105

Module Type:Precision Metrology Module

Measurement Range:Up to ±0.1 micron accuracy

Resolution:0.1 nanometer

Operating Temperature Range:-20°C to +70°C

Power Supply:100-240V AC, 50/60Hz

Communication Interface:Ethernet, USB

Weight:2.5 kg

Dimensions:30 cm x 20 cm x 10 cm

    The KLA KLA 5105 Advanced Inspection Module is a cutting-edge solution for semiconductor wafer inspection. Designed for precision and reliability, this module offers sub-50nm defect detection capabilities essential for modern semiconductor manufacturing. With high-resolution imaging, it ensures that even the smallest defects are identified and corrected, enhancing overall wafer quality. The integrated inspection software suite provides a comprehensive analysis platform, allowing technicians to monitor and optimize the inspection process efficiently. Operating at up to 200 wafers per hour, the KLA 5105 is built to handle high-volume production environments. Its robust design, weighing approximately 500kg, is built to withstand the rigorous demands of continuous operation. The KLA 5105 operates within a specific environmental range, requiring 220V AC power and ensuring stable performance under controlled conditions. Ideal for semiconductor fabrication facilities, this module is a vital tool for maintaining high standards of quality and efficiency.